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::: 可授權專利

穩定蒸鍍均勻性薄膜之方法及其裝置(分割案)

創作型式:
發明
專利證號:
US9783881
發明人:
倪國裕、黃偉傑、薄慧雲、梁仕昌、魏肇男
國別:
美國
獲證日期:
2017/10/10
專利摘要:
The present invention provides a switching component of a directly flat-attached active frequency selective surface (AFSS) and fabricating method thereof. The present invention utilizes P-type and N-type thin film materials to fabricate a PN diode switching component capable of adjusting a resonance frequency of the AFSS, such that the AFSS together with the switching component could be integrally fabricated into a single thin film. Therefore, by utilizing a stepwise coating method to fabricate each layer with corresponding material, an equivalent length of a metal pattern could be adjusted, thereby changing the resonance frequency of the AFSS.
IPC國際分類號:
H01L0021329