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::: 可授權專利

Copper-silver dual-component metal electroplating solution and electroplating method for semiconductor wire (用於半導體導線的銅銀雙成分金屬電鍍液體及電鍍方法)

創作型式:
發明
專利證號:
US10329681
發明人:
謝明達、王玉平、張欽亮、方人瑞、姜智豪、蔣良慧
國別:
美國
獲證日期:
2019/06/25
專利摘要:
A copper-silver dual-component metal electroplating solution includes copper methanesulfonate, silver methanesulfonate, methanesulfonic acid, chlorine ions, and water. An electroplating method for forming a copper-silver dual-component metal by using such an electroplating solution, the steps of which includes (a) contacting the copper-silver dual-component metal electroplating solution with a substrate; (b) applying an operating voltage, the current density of which is controlled to be between 0.1 and 2 ASD in order to carry out electroplating on the substrate. Therefore, the electroplating solution has environmental characteristics, such as less poisoning hazards, through the design of methanesulfonic acid and methanesulfonate electroplating solution. Also, the potential and the current are adjusted during the electroplating in order to obtain a copper-silver dual-component metal plating layer with a specific silver content.
IPC國際分類號:
C25D000358