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::: 可授權專利

可磊晶之散熱基板與其製作方法

創作型式:
發明
專利證號:
US9978590B1
發明人:
阮建龍、黃士哲、尤信介、郭養國
國別:
美國
獲證日期:
2018/05/22
專利摘要:
A method of manufacturing an epitaxiable heat-dissipating substrate comprises the steps of (A) forming a roughened surface on a substrate made of a polycrystalline or amorphous material with a high thermal conductivity coefficient; (B) forming a flat layer on the roughened surface; and (C) forming a buffer layer on the flat layer. The flat layer reduces the surface roughness of the substrate, and then the buffer layer functions as a base for epitaxial growth, thereby being directly applicable to production of semiconductor devices which are flat and capable of isotropic epitaxial growth.
IPC國際分類號:
H01L002102