*

::: 可授權專利

Device for measuring distribution of thermal field in crucible (一種用於量測坩堝內部熱場分部之裝置)

創作型式:
發明
專利證號:
US10612159B2
發明人:
趙英琮、馬代良、虞邦英、郭志偉、彭超群、柯政榮
國別:
美國
獲證日期:
2020/04/07
專利摘要:
A device for measuring distribution of thermal field in a crucible comprises a crucible comprising an upper lid, a body, a growth chamber and a material source zone; a thermally insulating material disposed outside the crucible; a movable heating component for heating the crucible; a plurality of thermocouples enclosed by insulating, high temperature resistant material and disposed in the crucible after being inserted into a plurality of holes on the upper lid to measure distribution of thermal field in the crucible. The thermocouples enclosed by insulating, high temperature resistant material are effective in measuring and adjusting temperature distribution in the crucible to achieve optimal temperature distribution for crystal growth in the crucible.
IPC國際分類號:
C23C001424