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::: 可授權專利

Method for reduction of interfacial stress accumulation between double side copper-plated layers and aluminum nitride substrate(一種降低雙面銅鍍層與氮化鋁基板之界面應力累積的方法)

創作型式:
發明
專利證號:
US10923621B2
發明人:
吳俊德、郭養國、施政宏、黃宏庭
國別:
美國
獲證日期:
2021/02/16
專利摘要:
The present invention uses a photolithography process and an electroplating process to perform. TAV copper filling and patterning of the fabrication of the double side copper-plated layers to plate the double side copper-plated layers in advance at the TAV through holes to serve as a stress buffer layer of the aluminum nitride substrates. Then the subsequent pattern designs of the copper-plated layers are customized. According to the simulation theory calculations, it is proved that the stress which accumulates on the short-side of the copper-plated layer of the aluminum nitride substrate with the asymmetric structure may be effectively reduced to facilitate the improvement of the reliability of the aluminum nitride substrate.
IPC國際分類號:
C04B0035581