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專利名稱 Bidirektionales Sprachsignalübertragungssystem und dessen Methode(數位語音傳輸系統及方法)
創作型式 發明
專利證號 DE102013222854.6
國別 德國
獲證日期 2015/5/13
專利摘要 A method of forming a pattern with high aspect ratio on a polycrystalline aluminum nitride substrate comprises the steps of (A) providing an aluminum nitride substrate and forming a barrier layer on the aluminum nitride substrate; (B) etching the barrier layer with an energy beam to form at least one recess in the barrier layer; (C) plasma etching the substrate to deepen the recess into the aluminum nitride substrate; (D) removing the barrier layer to obtain the aluminum nitride substrate having at least one pattern with high aspect ratio. The method uses the energy beam to directly form a pattern on the barrier layer, and further employs plasma etching to prepare the aluminum nitride substrate having a pattern with high aspect ratio quickly and effectively.

IPC國際分類號

H01L002100
聯絡人 王淳右
電話 #329566
EMAIL f437frank@ncsist.org.tw