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專利名稱 レ?ザ光斑??位置付け?動裝置と?動システム及びその方法 (一種雷射光斑絕對定位驅動裝置及方法)
創作型式 發明
專利證號 JP5477982
國別 日本
獲證日期 2014/02/21
專利摘要 A method of manufacturing an epitaxiable heat-dissipating substrate comprises the steps of (A) forming a roughened surface on a substrate made of a polycrystalline or amorphous material with a high thermal conductivity coefficient; (B) forming a flat layer on the roughened surface; and (C) forming a buffer layer on the flat layer. The flat layer reduces the surface roughness of the substrate, and then the buffer layer functions as a base for epitaxial growth, thereby being directly applicable to production of semiconductor devices which are flat and capable of isotropic epitaxial growth.

IPC國際分類號

H01L002102
聯絡人 王淳右
電話 #329566
EMAIL f437frank@ncsist.org.tw