| 專利摘要 | An error compensation device includes at least one photographing module, a comparison module and a compensation module compensation module. The photographing module establish a space coordinate system relative to the object and comprises a first photographer and a second photographer which respectively photograph a first non-deformed laser speckle image on a first surface and a second non-deformed laser speckle image on a second surface, the first surface differs from the second surface by an azimuth. The comparison module respectively compares the first non-deformed laser speckle image before and after the displacement with the second non-deformed laser speckle image to calculate a displacement value between the two surfaces. The compensation module controls the movement of the object according to the displacement value. The error compensation utilizes the displacement of the non-deformed laser speckle image to obtain the absolute error of the object and compensate the error. |