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專利名稱 穩定蒸鍍均勻性薄膜之方法及其裝置(分割案)
創作型式 發明
專利證號 US9783881
國別 美國
獲證日期 2017/10/10
專利摘要 The present invention provides a switching component of a directly flat-attached active frequency selective surface (AFSS) and fabricating method thereof. The present invention utilizes P-type and N-type thin film materials to fabricate a PN diode switching component capable of adjusting a resonance frequency of the AFSS, such that the AFSS together with the switching component could be integrally fabricated into a single thin film. Therefore, by utilizing a stepwise coating method to fabricate each layer with corresponding material, an equivalent length of a metal pattern could be adjusted, thereby changing the resonance frequency of the AFSS.

IPC國際分類號

H01L0021329
聯絡人 王淳右
電話 #329566
EMAIL f437frank@ncsist.org.tw