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專利權
【年度】101
年研發成果
【項目】
專利權
【領域】
關鍵技術科專
【類別】
機電運輸
| 計畫名稱 | 下世代儲電元件與系統技術開發計畫 | | 專利名稱 | Microwave Supplying Apparatus and Microwave Plasma System | | 發明人 | Chung-Chun Huang, Tsun-Hsu Chang, Bo-Hung Lin, Chi-Wen Hu | | 國家 | 美國 | | 性質 | 發明 | | 技術摘要 | The invention discloses a microwave supplying apparatus including a microwave generator, a first power divider, a second power divider, a first waveguide, and a second wave guide. The first waveguide is connected to the microwave generator and has a first output terminal and a second output terminal to divide a microwave generated by the microwave generator along a first direction. The second power divider is connected to the first output terminal and has a third output terminal and a fourth output terminal to divide the microwave along a second direction. The first waveguide and the second waveguide are connected to the third output terminal and the fourth terminal respectively and receive the microwave through the first power divider and the second power divider to respectively output the microwave fields with approximate intensity distributions. Claims | | 聯絡人姓名 | |
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