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論文
【年度】99
年研發成果
【項目】
論文
【領域】
關鍵技術科專
【類別】
機電運輸
| 計畫名稱 | 薄膜太陽能製程設備及模組關鍵技術研究發展三年計畫 | | 論文名稱 | Study of SIMOX Radiative Properties with FT-IR Spectrometer | | 論文類型 | 研討會 | | 發表處 | International Conference on Advanced Manufacture (2010) | | 發表人 | Jen-Chieh Tsao Chung-Jen Tseng Chiung-Chieh Su | | 發表日期 | 99/02/05 | | 國家 | 國外 | | 內容摘要 | The first accurate measurements of the temperature dependent radiative properties of separation by implantation of oxygen (SIMOX) wafers are reported in the present study. These measurements were performed for the temperature range from room temperature to 800 °C and the wavelength range from 0.7 to 20 μm using a Fourier Transform Infrared (FT-IR) spectrometer with a specifically designed high temperature cell. An empirical simulation, based on race tracing and transfer-matrix method for multi-layers modeling, has been developed and validated by experimental data. These studies may lead us to choose the appropriate wavelength of pyrometer for the process monitoring of SIMOX as well as to obtain reliable radiative properties for thermal analysis. Finally the limitations of analytical model are also discussed. |
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