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專利權
【年度】102
年研發成果
【項目】
專利權
【領域】
關鍵技術科專
【類別】
電資通光
| 計畫名稱 | 光電半導體元件與系統應用關鍵計畫 | | 專利名稱 | Actuating apparatus, actuating system and method for actuating a working stage to move relative to a platform with high-precision positioning capability | | 發明人 | 黃宜裕 | | 國家 | 美國 | | 性質 | 發明 | | 技術摘要 | An actuating apparatus includes a motion driving module rigidly coupled to a platform, a working stage driven by the motion driving module to move relative to the platform, a speckle image capturing module rigidly coupled to the working stage and capable of capturing a speckle image of a sub-region of a reference region of the platform, and a control module operable in a positioning mode, where the control module obtains a current position of the working stage in a coordinate system associated with the platform based on a comparison between the captured speckle image and reference speckle image information that is associated with and unique to the reference region, and controls the motion driving module to drive the working stage toward a target position in the coordinate system based on a difference between the current position and the target position. | | 聯絡人姓名 | |
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