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論文
【年度】103
年研發成果
【項目】
論文
【領域】
關鍵技術科專
【類別】
機電運輸
| 計畫名稱 | CIGS太陽電池關鍵技術開發計畫 | | 論文名稱 | Characteristics of the MoNa back contact layers by DC magnetron sputtering system | | 論文類型 | 研討會 | | 發表處 | IUMRS ICEM 2014 | | 發表人 | Chuang,Te-Ju | | 發表日期 | 2014/10/10 | | 國家 | 國外 | | 內容摘要 | In this study, characteristics of MoNa back contact layers were mostly discussed with varying the structural properties of MoNa layer with Na concentration of 10 at.%. Among Mo/MoNa/Mo sandwich structure, MoNa middle layers were carried out at the different working pressure. We found that all thin films remained the (110) preferred orientation and the MoNa layer had a tendency to form amorphous structure at low working pressure. At the lower than 7.5 mtorr, the residual stress of the films belonged to a compressive stress as well as the tensile stress of the films was observed at working pressure of 10 mtorr. The resistivity and sheet resistance were individually maintained the value of 3-5 uΩ-cm and 0.3-0.6 Ω/□. |
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